Flow velocity measurement in microchannel is an important issue because the flow velocity plays a crucial role in flow cytometry and cell/particle sorting. Despite its importance, the performance is restricted by the limited space of microchannel. The conventional thermal sensor with heating might damage biological objects flowing in the microchannel. In addition, the mechanical sensor with complicated structures is difficult to fabricate and it is challenging to place the sensor at the desired position for velocity measurement [1-2]. In this study, we propose the development of a transparent and durable flow velocity sensor made of an ultra-thin glass sheet by femtosecond laser processing that is simple in structure and with less influence to flow in the microchannel.

© 2019 Japan Society of Applied Physics, The Optical Society (OSA)

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